Memory apparatus including programmable non-volatile multi-bit memory cell, and apparatus and method for demarcating memory states of the cell

ABSTRACT

Memory states of a multi-bit memory cell are demarcated by generating read reference signals having levels that constitute boundaries of the memory states. The read reference signals may be dependent upon the levels of programming reference signals used for controlling the programming of the memory cell. The memory cell can thus be programmed without reading out its memory state during the programming process, with programming margins being assured by the dependence of the read reference signals on the programming reference signals. Both sets of reference signals may be generated by reference cells which track variations in the operating characteristics of the memory cell with changes in conditions, such as temperature and system voltages, to enhance the reliability of memory programming and readout.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a division of application Ser. No. 10/742,890 filed Dec. 23,2003, which is a division of Ser. No. 10/188,835 filed Jul. 5, 2002 nowU.S. Pat. No. 6,714,455, which is a division of application Ser. No.09/893,545 filed Jun. 29, 2001 now U.S. Pat. No. 6,434,050, which is adivision of application Ser. No.09/733,937 filed Dec. 12, 2000 now U.S.Pat. No. 6,353,554, which is a continuation of application Ser. No.09/493,139 filed Jan. 28, 2000 (abandoned), which is a division ofapplication Ser. No. 09/411,315 filed Oct. 4, 1999 (now U.S. Pat. No.6,246,613), which is a division of application Ser. No. 08/975,919 filedNov. 21, 1997 (now U.S. Pat. No. 6,002,614), which is acontinuation-in-part of application Ser. No. 08/410,200 filed Feb. 27,1995 (now U.S. Pat. No. 5,764,571).

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to non-volatile memory devices and is moreparticularly concerned with certain apparatus and methods based on newconcepts of memory state demarcation and programming reference signalgeneration for multi-bit electrically alterable non-volatile memory(EANVM) cells.

2. Related Background Art

In conventional single-bit per cell memory devices, the memory cellassumes one of two information storage states, either an “on” state oran “off” state. This combination of either “on” or “off” defines one bitof information. A memory device using such single-bit cells to store nbits of data (n being an integer greater than 0) thus requires nseparate memory cells.

Increasing the number of bits which can be stored in a single-bit percell memory device involves increasing the number of memory cells on aone-for-one basis with the number of bits of data to be stored. Methodsfor increasing the number of memory cells in a single memory device haverelied upon advanced manufacturing techniques that produce larger chipscontaining more memory cells or that produce smaller memory cells (e.g.,by high resolution lithography) to allow more memory cells to be placedin a given area on a single chip.

An alternative to the single-bit per cell approach involves storingmultiple bits of data in a single memory cell. Previous approaches toimplementing multiple-bit per cell non-volatile memory devices havetypically involved mask-programmable read only memories (ROMs). In oneof these approaches, the channel width and/or length of the memory cellis varied such that 2^(n) different conductivity values are obtainedwhich correspond to 2^(n) different states, whereby n bits of data canbe stored by a single memory cell. In another approach, the ion implantfor the threshold voltage is varied such that the memory cell will have2^(n) different voltage thresholds (Vt) corresponding to 2^(n) differentconductivity levels corresponding to 2^(n) different states, whereby nbits of data can be stored by a single memory cell. Examples of memorydevices of these types are described in U.S. Pat. No. 4,192,014 toCraycraft, U.S. Pat. No. 4,586,163 to Koike, U.S. Pat. No. 4,287,570 toStark, U.S. Pat. No. 4,327,424 to Wu, and U.S. Pat. No. 4,847,808 toKobatake.

Electrically alterable non-volatile memory (EANVM) devices capable ofstoring multiple bits of data per cell are also known. In these devices,the multiple memory states of the cell are demarcated by predeterminedreference signal levels that define boundaries between adjacent memorystates. The memory cell is read out by comparing a signal from the cellwith the reference signals to determine the relative levels of the cellsignal and the reference signals. The comparison results indicatewhether the cell signal level is above or below the respective memorystate boundaries, and thus collectively indicate the programmed state ofthe cell corresponding to the stored data. The comparison results areencoded to reproduce the stored data and complete the cell readoutoperation. Generally speaking, the number of reference levels requiredto demarcate n memory states for storing n bits of data is 2^(n)−1. Thenumber may be greater if, for example, the uppermost or lowermost memorystate is to be bounded on both sides.

Previous approaches to programming multi-bit EANVM cells are based on arepeated cycle of programming and readout of the cell. The cell isprogrammed incrementally, by the application of programming pulses, andthe programmed status of the cell is checked repeatedly during theprogramming process by reading out the memory state of the cell asdescribed above to verify the attained level of programming. Programmingis continued until the target memory state has been reached, asindicated by the readout of the cell.

In order to minimize the possibility of readout errors, the programminglevel of a multi-bit EANVM cell should be set with a margin relative tothe reference signal level or levels that demarcate the target memorystate. The programming margin should be sufficient to avoid readouterrors that might occur due to variations in operating characteristicsof the cell with changing conditions such as temperature, systemvoltages, or mere passage of time. More particularly, if the cell isprogrammed too close to a memory state boundary, slight variations inthe operating characteristics could shift the cell signal level relativeto the state boundary level, resulting in an error upon subsequentreadout of the cell.

Program margining is not particularly problematical in single-bit percell memory devices, since there are only two memory states, and thus nointermediate memory states. Because it is impossible to overshoot thetarget state by overprogramming the cell, the cell may simply beprogrammed to set the cell signal level as far as possible from thereference level bounding the two memory states.

By contrast, the presence of one or more intermediate memory statesmakes program margining a significant concern in the case of multi-bitper cell devices, because an intermediate memory state requires aprogramming margin that provides adequate separation from two boundarylevels—that is, the boundaries of the intermediate memory state withboth the state above and the state below. Programming the cell too closeto either level can result in a readout error. Also, bothoverprogramming and under programming must be avoided to preventovershooting and undershooting the target intermediate state.

Previous program margining techniques include techniques that, forprogramming purposes, shift the cell signal level or the referencesignal levels relative to their values during normal memory readout. Theeffect in either case is that, for a given programming amount of thecell, the cell will read differently during programming than during anormal readout operation. The difference corresponds to the shift amountof cell signal or the reference signals and provides a programmingmargin. Examples of these techniques are found in U.S. Pat. No.5,172,338 to Mehrotra et al. and in Beliker et al., “A Four-State EEPROMUsing Floating-Gate Memory Cells,” IEEE Journal of Solid State Circuits,Vol. SC-22, No. 3, June 1987, pp. 460-463.

Another margining technique involves the provision of additionalreference signals having levels intermediate those of thestate-demarcating reference levels. The intermediate reference levelsdefine program margin ranges in conjunction with the state-demarcatinglevels. After the cell reaches the target memory state, as indicated bycomparison with the state-demarcating signals, programming is continuedbased on further comparison of the cell signal with one or moreintermediate reference signals to provide a programming margin. Anexample of this technique is found in U.S. Pat. No. 4,964,079 to Devin.

In the above-described approaches to programming multi-bit per cellEANVM devices, the programming speed (total time to program a cell to atarget state) is substantially limited by the need for repeated readoutof the memory cell during the programming process. Also, theaforementioned program margining techniques impose substantialcomplications on the overall circuit design due to the need to shift thecell signal level or the state-demarcating reference signal levels, orto provide intermediate reference levels for establishing program marginranges in conjunction with the state-demarcating reference signallevels. Furthermore, these margining techniques do not assure an optimumprogramming margin throughout variations in operating characteristics ofthe cell, because they do not precisely track such variations withchanging conditions that affect the operating characteristics.

SUMMARY OF THE INVENTION

The predecessor applications underlying the present application disclosea completely different approach to multi-bit per cell EANVM programming(the approach is also described in detail herein). According to thisapproach, the programming control scheme uses a programming referencesignal corresponding to the target memory state to program the memorycell, and does not require reading out the memory state of the cellduring programming.

The invention claimed in the present application is based on newconcepts of memory state demarcation and programming reference signalgeneration that can be applied with great advantage to theaforementioned approach. According to a first of these concepts, aplurality of programming reference signals (or signals set insubstantial correspondence therewith) are used to generate thestate-demarcating reference signals. This is done in such a manner thateach programming reference signal (or correspondingly set signal) has alevel unique to its corresponding memory state. As will be more fullyappreciated from the detailed description that follows, by generatingthe state-demarcating reference signals in this manner, it becomespossible to program a multi-bit EANVM cell without reading out thecell's memory state during the programming operation, while at the sametime providing effective program margining without the complexitiesassociated with the previous margining techniques described above.

According to one of its broader aspects, the present invention thusprovides an apparatus for demarcating memory states of an EANVM cellhaving more than two memory states. The apparatus comprises a referencesignal generating circuit which generates a plurality of signalscorresponding to memory states of the cell, each signal having a levelunique to its corresponding memory state and substantially the same as aprogramming reference level for controlling programming of the cell tothe corresponding memory state. The reference signal generating circuituses the plurality of signals to generate reference signals havinglevels that constitute boundaries of memory states of the cell.

The invention also provides a programmable multi-level memory apparatus,which comprises an EANVM cell having more than two memory states, aprogramming circuit for programming the EANVM cell, and a referencesignal generating circuit as described above.

According to another of its broader aspects, the present inventionprovides an apparatus for demarcating memory states of an EANVM cellhaving more than two memory states, the apparatus comprising a referencesignal generating circuit which generates reference signals havinglevels that constitute boundaries of memory states of the cell. Thereference signals are generated dependent upon a plurality of signallevels that are set in substantial correspondence with programmingreference levels for controlling programming of the cell, with eachprogramming reference level being unique to a different memory state ofthe cell.

The invention also provides a programmable multi-level memory apparatus,which comprises an EANVM cell having more than two memory states, aprogramming circuit for programming the cell, and a reference signalgenerating circuit as just described.

In a preferred mode of the invention, the plurality of signals used togenerate state-bounding the reference signals are themselves generatedby reference cells that substantially track changes in operatingcharacteristics of the EANVM cell with changes in conditions that affectthe operating characteristics. The reference cells may havesubstantially the same construction as the EANVM cell, and bemanufactured concurrently with the EANVM cell, by the same fabricationprocess, as elements of the same integrated circuit with the EANVM cell.Thus, the signals that are used to generate the state-bounding referencesignals can track changes in the operating characteristics of the EANVMcell with high accuracy. This makes it possible to maintain optimumprogramming margins throughout variations in operating characteristicsof the EANVM cell.

Another new concept of the present invention relates to programmingreference signal generation, and in particular the use of referencecells for this purpose. According to this concept, which may (but neednot be) applied in conjunction with the first concept discussed above,the programming reference signals are generated by correspondingreference cells which substantially track changes in operatingcharacteristics of the EANVM cell with changes in conditions that affectthe characteristics. This assures a stable relationship between the cellsignal level and the programming reference signal levels and leads tobetter programming consistency.

Thus, in accordance with yet another of its broader aspects, the presentinvention provides a programmable multi-level memory apparatus whichcomprises an EANVM cell having more than two memory states, aprogramming reference signal generating circuit, and a programmingcircuit. The programming reference signal generating circuit includes aplurality of reference cells which substantially track changes inoperating characteristics in the EANVM cell with changes in conditionsthat affect the operating characteristics. The reference cells include acorresponding reference cell for each memory state, with each referencecell being programmed such that the programming reference signalgenerating circuit generates a programming reference signal having alevel unique to the corresponding memory state. The programming circuitselectively programs the EANVM cell in accordance with the level of eachprogramming reference cell.

Still further aspects of the invention relate to the methodology ofdemarcating memory states of a multi-level EANVM cell based on theprinciples discussed above.

The principles of the present invention, as well as its various aspects,features, and advantages, will be more fully appreciated from thefollowing detailed description taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a generic schematic representation of a non-volatile floatinggate memory cell.

FIG. 2 is a block diagram of a prior art single-bit memory system.

FIG. 3 is a timing diagram of the voltage threshold of a prior artsingle-bit per cell EANVM system being programmed from an erased “1”state to a programmed “0” state.

FIG. 4 is a timing diagram of the bit line voltage of a prior single-bitper cell EANVM during a read operation. It illustrates VOLTAGE signalsfor both the programmed and erased conditions.

FIG. 5 is a block diagram of an M×N memory array implementing amulti-bit per cell EANVM system.

FIG. 6 is a block diagram of a circuit for reading a multi-bit EANVMcell.

FIG. 7 shows the bit line voltage as a function of time during a readcycle for a 2-bit per cell EANVM which has been programmed to one offour possible states, (0,0), (1,0), (0,1) and a fully erased condition(1,1). Four separate voltage levels are represented in this figure, eachrepresenting one of the four possible states. Only one of these would bepresent for any given read operation.

FIG. 8 is a block diagram of a multi-bit per cell system combiningprogram/verify and read circuitry.

FIG. 9 is a timing diagram for the voltage threshold of a 2-bit EANVMcell being programmed from a fully erased (1,1) state to one of theother three possible states.

FIG. 10 is a timing diagram which illustrates the voltage threshold of a2-bit EANVM cell being erased from a fully programmed (0,0) state to oneof the other three possible states.

FIG. 11 is a timing diagram illustrating the voltage threshold of a2-bit EANVM cell during a program/verify cycle using fixed width programpulses.

FIG. 12 is a timing diagram illustrating the bit line voltage of a 2-bitEANVM cell during a program/verify process which uses fixed widthprogram pulses.

FIG. 13 is a timing diagram illustrating the voltage threshold of a2-bit EANVM cell during a program/verify cycle using variable widthprogram pulses.

FIG. 14 is a timing diagram illustrating the bit line voltage of a 2-bitEANVM cell during a program/verify process which uses variable widthprogram pulses.

FIG. 15 is a simplified diagram of a circuit for generating readreference voltages for demarcating memory states in a 2-bit per cellEANVM in accordance with the present invention.

FIG. 16 is a diagram showing the relationship between the read andprogramming reference voltages in a memory system using the circuit ofFIG. 15.

FIG. 17 illustrates a modification to the circuit of FIG. 15.

FIG. 18 illustrates another circuit for generating read referencevoltages.

FIG. 19 is a more generalized diagram illustrating how the circuit ofFIG. 16 can be applied to a 2-bit per cell EANVM array.

FIG. 20 is a simplified diagram of a circuit for generating programmingreference voltages in accordance with the present invention. The circuitis shown coupled to a verify reference select circuit for selectingamong the programming reference voltages.

FIGS. 21A-21D are timing diagrams of the bit line voltage during readoutof a 2-bit EANVM cell programmed according to programming referencesignals for each of the four possible memory states.

FIG. 22 is a simplified diagram illustrating a combined circuit forgenerating both read and programming reference voltages in accordancewith the present invention.

FIG. 23 is a diagram similar to FIG. 22, but in which the referencecells are in the form of ROM cells.

DETAILED DESCRIPTION OF THE INVENTION

The invention will now be described in detail in relation to severalpreferred embodiments illustrated in the accompanying drawings. Ofcourse, it will be understood that the illustrative embodiments aremerely exemplary and that the scope of the present invention, as definedin the appended claims, encompasses a wide range of alternatives,modifications and equivalents, which may be implemented consistent withthe basic principles described herein.

Generally speaking, the invention described herein allows multiple bitsof information to be efficiently and reliably stored in and read from anelectrically alterable non-volatile memory (EANVM). In the preferredpractice of the invention, this is accomplished by electrically varyingthe conductivity of the channel of a floating gate FET to be within anyone of K^(n) conductivity ranges, where “K” represents the base of thenumbering system being employed (in a binary system, K=2) and n is thenumber of bits stored per cell (n≧2). The conductivity range is thensensed and encoded based on reference signal levels corresponding toboundaries of the conductivity ranges to read out the memory cell. Thefloating gate FET conductivity is electrically modified usingprogramming hardware and algorithms which supply appropriate signals tothe EANVM memory device in a program/verify control cycle whichincrementally stores electrons on the floating gate until the desiredconductivity level is achieved. For the purpose of illustration, thesystems described herein will assume a binary system which stores 2-bitsper memory cell.

I. Conventional Single-Bit EANVM Devices

Before considering the subject matter of the present invention indetail, it is appropriate, for purposes of perspective, to considerconventional single-bit per cell EANVM devices.

FIG. 1 is a generic schematic representation of a non-volatile floatinggate FET memory cell 10.

The FET memory cell 10 includes a control gate 12 which is used eitherto select the memory cell for reading or is used to cause electrons tobe injected onto a floating gate 14 during the programming process.Floating gate 14 is an electrically isolated structure which canindefinitely store electrons. A drain region 16 of the FET is coupled toa source region 18 by a channel region 19. The presence or absence ofelectrons on floating gate 14 alters the voltage threshold of the memorycell 10 and, as a result, alters the conductivity of its channel region.When the floating gate 14 is fully erased and the control gate 12 hasbeen selected, the channel region 19 is in the fully “on”, or highconductivity, state. When the floating gate 14 is fully programmed, thechannel region 19 is in the fully “off”, or low conductivity, state.

FIG. 2 is a block diagram of a conventional single-bit EANVM memorysystem 30. The memory system 30 stores a single bit of information in anEANVM cell (FET) 32. The cell 32, which has the same construction as FET10 in FIG. 1, is selected for reading or writing when a row, or word,select signal is applied to a control gate terminal 34. A sourceterminal 36 for the cell 32 is connected to a reference groundpotential. A drain terminal 38 is connected through a pull-up device(resistor) 39 to a voltage Vpull-up at a terminal 40. Terminal 38 servesas the output terminal of the cell 32. When the cell 32 stores a “0”bit, the channel of the FET is in a low conductivity, or high impedance,state so that the voltage at terminal 38 is pulled up to the voltagelevel Vpull-up on terminal 40. When the cell 32 stores a “1” bit, thechannel of the FET is in a high conductivity, or low impedance, state sothat the voltage at terminal 38 is pulled-down by the ground potentialat terminal 36.

For reading the value of the single bit stored in the cell 32, a senseamplifier 42 compares the voltage at terminal 38 with a referencevoltage Ref at terminal 43. If a “0” is stored on the EANVM cell 32, thecell is in a low conductivity state and, as a result, the voltage atterminal 38 is above the reference voltage at terminal 43. The outputterminal 44 of the sense amplifier 42 will be at a low voltage, whichwill be transmitted through an output buffer 46 to a terminal 48 andthen coupled to an I/O terminal 50 as a logical “0”. If a “1” is storedin the EANVM cell 32, the cell is in a high conductivity state and, as aresult, the voltage at terminal 38 is below the reference voltage atterminal 43. The output of the sense amplifier 42 will be a high voltagewhich will be transmitted to the I/O terminal 50 as a logical “1”.

For writing the value of an information bit in the cell 32, it isassumed that the cell 32 is initially in the erased or fully “on” state,which corresponds to a logical “1”. The I/O terminal 50 is connected tothe input terminal of an input latch/buffer 52. The output of the inputlatch/buffer 52 is connected to an enable/disable terminal 54 of aprogram voltage switch 56. The program voltage switch 56 provides abit-line program voltage on a signal line 58 connected to terminal 38.Another output from the program voltage switch 56 is the word lineprogram voltage on a signal line 62, which is connected to the controlgate terminal 34 of the EANVM cell 32. When a logical “0” is present atterminal 54 of the program voltage switch 56 from the output of inputlatch/buffer 52 and the program voltage switch 56 is activated by aprogram pulse on a signal line 64 from a program pulse generator 66,activated by a PGM/Write (Program/Write) signal, the program voltageswitch 56 provides the program voltage Vpp (typically 12 volts) from aterminal 68 to the control gate terminal 34 of the EANVM cell 32 viasignal line 62. The program voltage switch 56 also biases the drain ofthe EANVM cell 32 to a voltage somewhat less that Vpp, typically about 8to 9 volts. Under these conditions, electrons are injected into thefloating gate by a phenomenon known as hot electron injection. Thisprogramming procedure raises the voltage threshold of the EANVM cell,which increases its source-drain impedance. This continues until the FETmemory cell 32 is effectively turned off, which corresponds to a “0”state. When a “1” is present on terminal 54 from the output of the inputlatch/buffer 52 and the PGM/Write signal is enabled, the signal line 58is driven low and programming is inhibited so that the “1” or erasedstate is maintained.

FIG. 3 is a timing diagram showing the change in voltage threshold ofthe EANVM cell 32 under control of the word line and bit lineprogramming voltages as the memory cell is being programmed from thefully erased “1” state to the fully programmed “0” state. Forsimplicity, the word line and bit line programming voltages, which arecontrolled by the PGM/Write signal, are shown as a single pulse. For theduration of the PGM/Write pulse, the bit and word line program voltagesare respectively applied to the drain of the memory cell 32 via the bitline terminal 38 and to the control gate via the control gate terminal34 of the memory cell 32. As electrons are injected onto the floatinggate, the voltage threshold of the memory cell begins to increase. Oncethe voltage threshold has been increased beyond a specific thresholdvalue indicated by the dashed horizontal line, the memory cell 32 isprogrammed to a “0” state.

Fowler-Nordheim tunneling can also be used instead of hot electroninjection to place electrons on the floating gate. The multi-bit EANVMdevice described herein functions with either memory cell programmingtechnique. The conventional programming algorithms and circuits foreither type of programming are designed to program a single-bit cellwith as much margin as possible in as short a time as possible. For asingle-bit memory cell, margin is defined as the additional voltagethreshold needed to insure that the programmed cell will retain itsstored value over time.

FIG. 4 is a timing diagram showing the bit line voltage at terminal 38as a function of time during a memory read operation. In this example,prior to time t1 the bit line is charged to the Vpull-up condition. Notethat it is also possible that the bit line may start at any othervoltage level prior to time t1. At time t1, the EANVM cell 32 isselected and, if the cell 32 is in the erased or “1” state, the cell 32provides a low impedance path to ground. As a result, the bit line ispulled-down to near the ground potential provided at terminal 36 in FIG.2. If the EANVM cell 32 were in the “0” or fully programmed state, thebit line voltage would remain at the Vpull-up voltage after time t1. Thevoltage on the bit-line terminal 38 and the reference voltage Ref atterminal 43 are compared by the sense amplifier 42, whose bufferedoutput drives I/O terminal 50. When the reference voltage is greaterthan the bit line voltage, the output on I/O terminal 50 is a logical“1”. When the reference voltage is lower than the bit line voltage, theoutput on I/O terminal 50 is a logical “0”.

II. Memory Array for a Multi-Bit EANVM System

FIG. 5 is a block diagram of a multi-bit per cell EANVM system 100 inaccordance with the present invention, which includes an M×N array ofEANVM cells. The cells are shown as floating gate FET cells 102, havingthe same construction as described in connection with FIG. 1. Thegeneral arrangement of the system is similar to that used forconventional single-bit per cell memory devices, although on a detailedlevel there are significant differences related to the multi-bit percell implementation as will be apparent later.

Each cell 102 in FIG. 5 belongs to a row and a column of the array andhas its source connected to a ground reference potential and its drainconnected to a corresponding column bit line 106. The column bit linesare connected to corresponding pull-up devices indicated collectively bythe block 105. All control gates of a row of cells are connected to acorresponding row select, or word, line 104. Rows are selected with arow select circuit 108 and columns are selected with a column selectcircuit 110 in the usual manner. Row and column address signals areprovided over corresponding address busses 103A and 103B. Senseamplifiers 112 are provided for each of the columns of the array.Decode/encode circuits 114 and n-bit input/output latches/buffers 116are also provided (n=2 for a 2-bit per cell system). A PGM/Write signalis provided at an input terminal 118 for activating a mode controlcircuit 120 and a timing circuit 122.

A significant advantage of this multi-bit per cell system 100 ascompared to a single-bit per cell implementation is that the memorydensity is increased by a factor of n, where n is the number of bitswhich can be stored in an individual multi-bit memory cell.

III. Basic Read Mode/Circuitry for Multi-Bit Memory Cell

FIG. 6 shows a binary system 150 for reading the state of multi-bitfloating gate memory cell 102. For this example, the number of bits percell (n) is assumed to be 2, so that one of four states of the memorycell must be detected, the four possible states being (0,0), (0,1),(1,0), and (1,1). To detect which state is programmed, a 4-level senseamplifier 152 is provided. This amplifier includes three senseamplifiers 154, 156, and 158, each of which has its negative inputterminal connected to the output terminal 138 of the memory cell 102.Sense amplifier 154 has a reference voltage Ref3 connected to itspositive input terminal, sense amplifier 156 has a reference voltageRef2 connected to its positive input terminal, and sense amplifier 158has a reference voltage Ref1 connected to its positive input terminal.These reference voltages demarcate the four memory states of the cell102 and are set so as to satisfy the relationship Vpull-up >Ref3 >Ref2>Ref1 (preferred techniques for generating these reference voltages willbe described later). The respective output signals S3, S2, S1 of thethree sense amplifiers drive an encode logic circuit 160, which encodesthe sensed signals S3, S2, S1 into an appropriate 2-bit data format. Bit0 is provided at an I/O terminal 162, and Bit 1 is provided at an I/Oterminal 164. A truth table for the encode logic circuit 160 is asfollows:

S3 S2 S1 I/O 1 I/O 0 State L L L 0 0 (0, 0) H L L 1 0 (1, 0) H H L 0 1(0, 1) H H H 1 1 (1, 1)

During a read operation of the multi-bit memory cell 102, the levels ofthe respective output signals S3, S2, S1 of the sense amplifiers 154,156, 158 are determined by the conductivity value to which the memorycell has been set during a programming operation (to be describedlater). When fully erased, EANVM cell 102 will be in its lowestthreshold voltage state—that is, the highest conductivity state.Consequently, all of the reference voltages will be higher than the bitline voltage at terminal 138, indicating a (1,1) state. When fullyprogrammed, EANVM cell 102 will be in its highest threshold voltagestate, that is, its lowest conductivity state. Consequently, allreference voltages will be lower than the bit line voltage at terminal138, indicating a (0,0) state. The intermediate threshold states areencoded as illustrated in the previous truth table for the logic circuit160.

FIG. 7 shows the bit line voltage at terminal 138 as a function of timeduring a read cycle for the memory cell 102. For purposes ofillustration, each of the four possible voltage signals corresponding tothe four possible programmed states of the memory cell are shown. Duringa read cycle, only the signal corresponding to the actual programmedstate of the EANVM cell would occur. For example, assume the EANVMmemory cell 102 has been programmed to a (1,0) state. Prior to time t1,because the EANVM cell 102 has not yet been selected or activated, thebit line 106 is pulled up to Vpull-up. At time t1, the EANVM cell isselected using standard memory address decoding techniques. Because theEANVM cell has been programmed to a specific conductivity level by thecharge on the floating gate, the bit line is pulled down to a specificvoltage level corresponding to the amount of current that the cell cansink at this specific conductivity level. When this point is reached attime t2, the bit line voltage stabilizes at a voltage level Vref3between reference voltages Ref 3 and Ref 2 which bound the (1,0) state.When the EANVM cell 102 is de-selected, the bit line voltage will returnto its pulled-up condition. Similarly, the bit-line voltage stabilizesat Vref2 for the (0,1) state or at 0 volts for the (1,1) state.

IV. Program and Read Circuitry for Multi-Bit EANVM Cell

FIG. 8 is a block diagram of circuitry 200 for programming and readingmemory cell 102. Although a binary 2-bit per cell system is shown forpurposes of illustration, it is to be understood that the principles ofthe invention are similarly applicable to any system where the EANVMcell has more than two states. For example, in a non-binary system, thememory states can be three or some other multiple of a non-binary base.

The system 200 includes a memory cell 102 with a bit line outputterminal 138. For the read mode of operation, the 4-level senseamplifier 152, supplied with read reference voltages Ref1, Ref2, andRef3, and the encoder 160 are provided. Read data is provided at the Bit0 I/O terminal 162 and at the Bit 1 I/O terminal 164.

For the write mode of operation, a verify reference select circuit 222provides an analog programming voltage reference level signal X to oneinput terminal of an analog comparator 202. The programming referencevoltages are chosen so that as soon as the bit line voltage on bit line106 has reached the programming reference voltage level corresponding toa target memory state, the EANVM cell 102 is set to a proper thresholdcorresponding to the target memory state. The programming referencevoltages Vref1, Vref2, Vref3, and Vref4 are set such that Vref4 is aboveRef3, Vref3 is between Ref3 and Ref2, Vref2 is between Ref1 and Ref2,and Vref1 is below Ref1. During a normal read operation of eitherintermediate memory state, the bit line voltage will thus settlesubstantially midway between the read reference voltages demarcating theintermediate state to insure that the memory contents will be readaccurately.

The verify reference select circuit 222 is controlled by the two outputbits from a 2-bit input latch/buffer circuit 224, which receives binaryinput bits from the I/O terminals 162 and 164. The Y signal inputterminal of the analog comparator 202 is connected to the bit lineoutput terminal 138 of the multi-level memory cell 102. The outputsignal from the analog comparator is provided on a signal line 204 as anenable/disable signal for a program voltage switch 220.

An output signal line 206 from the program voltage switch 220 providesthe word line program voltage to the control gate of the EANVM cell 102.Another output signal line 106 provides the bit line programming voltageto the bit line terminal 138 of EANVM cell 102.

After the program/verify timing circuit 208 is enabled by a PGM/Writesignal provided on signal line 212 from a PGM/Write terminal 214, thetiming circuit 208 provides a series of program/verify timing pulses tothe program voltage switch 220 on a signal line 210. The pulse widthsare set to control the programming process so that the voltage thresholdof the EANVM cell 102 is incrementally altered by controlling theinjection of charge onto the floating gate of the EANVM cell. Eachprogramming cycle changes the voltage threshold and, as a result, theconductivity of the memory cell 102. After each internal program cycleis complete, as indicated by signal line 210 going “high”, the programvoltages provided by the program voltage switch 220 are removed, and averify cycle begins. The voltage threshold of memory cell 102 is thendetermined by using the comparator 202 to compare the bit line voltageat terminal 138 with the selected programming reference voltage from theverify reference select circuit 222. When the bit line voltage hasreached the level of the programming reference voltage supplied by theverify reference select circuit 222, the output signal from thecomparator on line 204 will disable the program voltage switch 220,ending the programming cycle.

For this embodiment of the invention, during a write operation,comparison of the current memory cell analog contents with the analoginformation to be programmed on the memory cell 102 is performed by theanalog comparator 202. The verify reference select circuit 222 analogoutput voltage X is determined by decoding the output of the 2-bit inputlatch/buffer 224. The Y input signal to the analog comparator 202 istaken directly from the bit line terminal 138. Note that the 4-levelsense/encode circuits 152, 160, and verify reference select circuit 222may be completely independent, as indicated in the drawing.Alternatively, they may be coupled together to alternately time sharecommon circuit components. This is possible because the 4-levelsense/encode circuits 152 and 160 are used in the read mode of operationwhile the verify reference select circuit 222 is used only in thewrite/verify mode of operation.

V. Basic Write Mode for Multi-Bit EANVM Cell

In the write mode, a binary multi-bit per cell EANVM system must becapable of electrically programming a memory cell to provide 2^(n)uniquely different threshold levels (n=the number of bits per cell). Inthe two-bit per cell implementation, if it is assumed that the cellstarts from the erased (1,1) state, it is only necessary to program tothree different thresholds which correspond to the three non-erasedstates. A first such threshold is determined so that, in the read mode,the bit line voltage will fall between Ref1 and Ref2. Another suchthreshold is determined so that, in the read mode, the bit line voltagewill fall between Ref2 and Ref3. The third such threshold is determinedso that, in the read mode, the bit line voltage will be greater thanRef3.

FIG. 9 illustrates the change in voltage threshold of a 4-level, or2-bit, EANVM cell as the floating gate is being charged from an erased(1,1) threshold state to any one of the three other possible states (thecharging being shown as continuous for simplicity). Vt1, Vt2, and Vt3 inFIG. 9 are thresholds corresponding to the read reference levels Ref1,Ref2, and Ref3, respectively. The plots labeled (0,1), (1,0), and (0,0)correspond to the programming thresholds for those states, which are thethree non-erased states. In prior art single-bit memory cells wherethere are only two states, the design objective is to provide enoughcharge to the floating gate to insure that the cell's voltage thresholdis programmed as high as possible, as shown in FIG. 3. Because there isno upper threshold limit in a single-bit per cell system,overprogramming the cell will not cause incorrect data to be stored onthe memory cell.

As will be appreciated from FIG. 9, in a multi-bit per cell system, thememory cell must be charged to a point so that the voltage threshold iswithin a specific voltage threshold range. For example, where the cellis being programmed to a (1,0) state, the proper threshold range isdefined as being above a threshold level Vt2 and as being below athreshold level Vt3. To accomplish this multi-level programming, theprior art EANVM circuitry is modified to the arrangement shown in FIG.8. The comparator in FIG. 8, incidentally, is preferably analog asshown. However, a digital comparator could be used.

FIG. 10 illustrates the voltage threshold of a 4-level, or 2-bit, EANVMcell as the floating gate is being erased from a (0,0) state (theerasing being shown as continuous for simplicity). The EANVM programmingoperating procedure may call for a memory cell to be erased prior tobeing programmed. This erasure can be performed at the byte, block, orchip level and can be performed by electrical, UV, or other means. Inthis type of system, the cell would be completely erased to a (1,1)state prior to initiating a programming cycle. If a system has thecapability to erase an individual memory cell, then it is not necessaryto erase all of the cells of a group prior to initiating a programmingoperation. It is then possible to incrementally erase an individualmemory cell as necessary to program the cell to the appropriate one ofthe voltage thresholds indicated by the plots labeled (1,0), (0,1), and(1,1).

FIG. 11 is a voltage threshold timing diagram which illustrates how thesystem of FIG. 8 programs the 2-bit EANVM cell 102 from an erased (1,1)state to a (1,0) state using the timing circuitry 208 to generatefixed-width timing pulses. A low logic level state of the PGM/Writesignal on signal line 212 enables the timing circuit 208. After beingenabled at time t1, the timing circuit 208 provides an internalfixed-width low-level internal PGM timing pulse on signal line 210 tothe program voltage switch 220. This pulse is output following aninitial verify cycle which will be discussed in connection with FIG. 12.For the duration of the low state of the internal PGM timing pulse, thebit line and word line program voltage outputs on lines 106 and 206 willbe raised to their respective programming voltage levels as indicated inFIG. 11. During this programming process, charge is added to thefloating gate of the memory cell 102. When the internal PGM timing pulsefrom timing circuitry 208 switches to a high level, the programmingvoltages are removed and a verify cycle begins. For this example, verifyreference voltage Vref3 is compared with the bit line voltage. Thisinternally controlled program/verify cycle repeats itself until the bitline voltage on terminal 138 has reached Vref3. At this time, t2, theEANVM cell 102 is verified to have been programmed to a (1,0) state, andprogramming is halted by the comparator 222 providing a disable signalon signal line 204 to the program voltage switch 220.

FIG. 12 illustrates the bit line voltage of the 2-bit EANVM cell 102 asit is being programmed from the fully erased, or fully “on”, state (1,1)to the partially “off” state (1,0) using fixed-width program pulses.When the externally applied PGM/Write pulse is applied at time t1, theprogram/verify timing circuit 208 first initiates a verify cycle todetermine the current status of the memory cell 102. This is indicatedby the bit line voltage being pulled to a ground condition(corresponding to the erased state) from, in this example, Vpull-up,although prior to time t1, the bit line voltage could be pre-set to anyvoltage level. Once the cell has been determined to be in the erasedstate, the first program cycle is initiated. This is represented by thebit line voltage being pulled up to Vprogram. After the firstfixed-width programming pulse ends, a verify cycle begins. This isrepresented by the bit line voltage being pulled down to a point midwaybetween ground potential and Ref1. During each successive verify cycle,the bit line voltage is observed to incrementally increase. Thisprogram/verify cycle continues until the bit line voltage has reachedthe selected programming reference voltage, in this case Vref3, whichindicates a memory state of (1,0), at time t2.

FIG. 13 illustrates how the 2-bit EANVM cell 102 is programmed from theerased (1,1) state to the (1,0) state using a timing circuit 208 thatgenerates variable-width programming pulses. The internal PGM pulses forthis implementation start with a low state longer than for thefixed-width implementation of FIGS. 11 and 12. The low state pulsewidths grow progressively shorter as the memory cell approaches thetarget voltage threshold. This approach requires more precise controlthan the fixed-width approach. However, programming times can be greatlyreduced on average.

FIG. 14 illustrates the bit line voltage of cell 102 as it is beingprogrammed from the fully erased, or fully “on”, state (1,1) to thepartially “off” state (1,0) using variable length program pulses. Whenthe externally applied PGM/Write pulse goes to an active low level attime t1, the program/verify timing circuit 208 first initiates a verifycycle to determine the current status of the memory cell 102. This isindicated by the bit line voltage being pulled to a ground condition(corresponding to the erased state) from, in this example, Vpull-up,although prior to time t1, the bit line voltage could be preset to anyvoltage level. Once the cell has been determined to be in the erasedstate, the first program cycle is initiated. This is represented by thebit line voltage being pulled up to Vprogram. After the first variablelength programming pulse is over, another verify cycle begins. This isrepresented by the bit line voltage being pulled down to a point midwaybetween Ref1 and Ref2. During each successive verify cycle, the bit linevoltage is observed to have increased. This program/verify cyclecontinues until the bit line voltage has reached the selectedprogramming reference voltage, in this case Vref3, which indicates amemory state of (1,0), at time t2.

As explained above, the programming process for the multi-bit per cellEANVM uses program/verify cycles, to incrementally program the cell. Thedurations of these cycles are determined by the timing circuit 208. Akey element of the system is to provide a programming scheme whichprovides for accurate programming of the memory cell 102. This isaccomplished by matching the pulse widths of the timing pulses of thetiming circuitry 208 to the program time of the EANVM cell being used.As seen from FIGS. 11 and 13, a desired voltage threshold actually fallswithin a range of threshold voltages. If the program pulses are toolong, then too much charge may be added to the floating gate of thememory cell 102. This may result in an overshoot of the target voltagethreshold, resulting in incorrect data being stored in the memory cell.

The programming pulse width is set such that if the voltage threshold ofthe cell 102 after the (N-1)Th programming pulse is at a point justbelow the target voltage threshold, then the (N)Th, or final, programpulse will not cause an overshoot resulting in an over programmedcondition for a memory cell.

VI. Embodiments to Establish Reference Voltages for Programming andMemory State Demarcation

The program and read circuitry in FIG. 8 uses selectable programmingreference voltage signals supplied to a bit line comparator to controlprogramming of the multi-bit memory cell. Programming is accomplishedwithout reading out the cell. This allows for a significant reduction inprogramming time relative to previous systems that require repeatedreadout of the memory state of the cell during the programming process.

The following discussion addresses preferred modes of reference signalgeneration in accordance with the present invention. In principle, thesystem of FIG. 8 is not limited as to the manner in which theprogramming and read reference signals are established. The embodimentsdescribed in this section, however, implement important new concepts inmemory state demarcation and programming control to enhance thereliability of the system.

The embodiments for memory state demarcation are based on a new conceptwhereby the read reference signals are generated using the programmingreference signals, or signals set in substantial correspondence with theprogramming reference signals. The read reference signals are thuseffectively dependent upon the programming reference signals. Because ofthis dependence, the system design can guarantee that the two sets ofsignals will closely conform with a predetermined relationship forprogram margining. For example, as will be seen in the illustrativeembodiments, the programming reference voltages of two adjacent memorystates may be subjected to voltage division to generate the interveningread reference voltage. The read reference voltage will then fall midwaybetween the two programming reference voltages. As a result, the twoprogramming reference voltages are equally marginate from the readreference voltage.

The embodiments related to programming control particularly addressprogramming reference voltage generation. These embodiments employreference cells which substantially track changes in operatingcharacteristics of the memory cell (and thus its bit line signal) withchanging conditions that affect the operating characteristics, such astemperature, system voltages, or mere passage of time. The use of suchreference cells, which preferably have the same (or at least in largepart the same) construction as the memory cell, assures a stablerelationship between the programming reference voltages and theoperating characteristics of the memory cell.

When the reference cells for program voltage generation are used togenerate the read reference voltages as well, the read referencevoltages will also closely track the changes in operatingcharacteristics of the memory cell. This assures that data stored in thememory cell over a long period of time can be read out accurately. Analternative to using the programming reference cells for this purpose isto use a separate group of reference cells to generate voltagessubstantially the same as the programming reference voltages. Using thevoltages from the separate group of cells to generate the read referencevoltages would provide a similar tracking effect of the read referencevoltages.

FIG. 15 is a simplified diagram illustrating a circuit for generatingthe read reference voltages Ref1, Ref2, and Ref3. In the form shown, theread reference voltages are generated by corresponding columns 1210,1211, and 1212 of the circuit, each comprising a pair of reference cellsconnected in a voltage divider arrangement to generate the correspondingread reference signal. Column 1210 includes a first pair of referencecells 1203, 1204 for generating voltage Ref1. Column 1211 includes asecond pair of reference cells 1205, 1206 for generating voltage Ref2.Column 1212 includes a third pair of reference cells 1207, 1208 forgenerating voltage Ref3. Also shown in FIG. 15 is a bit line column1209. The bit line column constitutes a portion of the main memory cellarray and includes a memory cell 1202.

In order that the read reference voltages will precisely track changesin the memory cell bit line signal with changing conditions that affectthe operating characteristics of the memory cells in the main array,reference cells 1203-1208 of the reference voltage generating circuitmay, in one preferred mode, be of the same type and construction astheir associated memory cells (e.g., cell 1202) of the main array. Thus,all of the cells 1202-1208 in FIG. 15 are assumed to befloating-gate-FET EANVM cells as previously described, all having thesame construction. The reference cells, and indeed the referencecolumns, are preferably fabricated simultaneously with and by the samemethod as the columns of the main array, as part of the same integratedcircuit with the array. Alternatively, the reference columns may befabricated by way of the same method as the main memory cell array, butat a different time and/or as parts of a different integrated circuit.

Each of the reference cells 1203-1208 in FIG. 15 shares a common word(row select) line 1243 with the memory cell 1202. Each reference cell isalso coupled, at its bit line, to a column pull-up voltage Vpull-up andthe associated column output terminal via associated select transistors(FETS) 1201 and 1213, which may be NMOS or PMOS devices, for example.The select transistors 1201 are controlled via respective select lines1214′, and the select transistors 1213 are controlled via respectiveselect lines 1215′. The bit lines of each pair of reference cells areconnected together, as shown, to form the respective voltage dividerarrangements. The memory cell 1202 is also coupled to a column pull-upvoltage and the associated column bit line output via a pair of selecttransistors 1201, 1213 controlled respectively by select lines 1214,1215.

The reference cells 1203-1208 are pre-programmed at the factory tovoltage thresholds corresponding to the programming reference voltagesVref1-Vref4. Specifically, reference cells 1203 and 1204 are programmedrespectively to voltage thresholds V1 and V2 to produce voltages equalto programming reference voltages Vref1 and Vref2 on their respectivebit lines. Reference cells 1205 and 1206 are respectively programmed tovoltage thresholds V2 and V3 to produce voltages equal to programmingreference voltages Vref2 and Vref3. Reference cells 1207 and 1208 arerespectively programmed to voltage thresholds V3 and V4 to producevoltages equal to programming references Vref3 and Vref4. Theprogramming of the reference cells may be accomplished in any suitablemanner. For example, the memory device may be provided with dedicatedpins for external application of standard reference voltages to chargethe cells. As another alternative, the memory device may incorporate anon-board set of ROM cells having implant dosages for providing bit linevoltages corresponding to the desired programming reference voltages.The ROM bit line voltages would be used as programming referencevoltages for initially programming the EANVM reference cells. The EANVMreference cells could be selectively coupled to the program verificationcomparator 202 (FIG. 8) to provide signal Y, and the ROM bit linevoltages could be selectively applied to the comparator as signal X toprogram the EANVM reference cells by a programming operation aspreviously described. By using programming pulses of small width(s), thereference cells would be programmed with good accuracy. The ROM cellscould also be used to reprogram the EANVM reference cells (underpredetermined standard conditions) to restore the voltage thresholds ofthe reference cells to design values, if necessary.

By setting the successive programming reference voltages Vref1-Vref4 atequal intervals and correspondingly programming the voltage thresholdsof the reference cells, the reference signal generating circuit shown inFIG. 15 establishes relationships between the programming referencevoltages and the read reference voltages as shown in FIG. 16. It shouldbe noted that the assignment of particular memory states to theprogramming reference voltages Vref1-Vref4 is not a critical matter,although good design practice dictates that the assignments should beconsistent throughout the memory system. In a system employing errorcorrection, it may be advantageous to assign the memory states out ofbinary sequence to facilitate optimization of error detection andcorrection algorithms. The present discussion assumes assignment of thememory states to the programming reference voltages in a non-binarysequence. Specifically, memory state (1,1) is assigned to the first(lowest) programming reference voltage Vref1, memory state (0,1) isassigned to the second programming reference voltage Vref2, memory state(1,0) is assigned to the third programming reference voltage Vref3, andmemory state (0,0) is assigned to the fourth (highest) programmingreference voltage Vref4.

As shown in FIG. 16, each read reference voltage is established so thatthe programming reference voltages for the memory states immediatelyabove and below are equally margined relative to the read referencevoltage. More particularly, the read reference voltages are defined asfollows:Ref 1=(Vref 1+Vref 2)/2Ref 2=(Vref 2+Vref 3)/2Ref 3=(Vref 3+Vref 4)/2

By virtue of the foregoing relationships, each read reference level willalways be optimally margined relative to the adjacent programmingreference levels at a position midway between the programming referencelevels. Furthermore, because the operating characteristics of thereference cells track variations in the operating characteristics of thememory cell with changing conditions that affect the operatingcharacteristics, the relationships shown in FIG. 16 are maintainedthroughout such variations. This ensures that data stored in the memorycell over a long period of time can be read out accurately despitedifferences in temperature, system voltages, etc. at the time of readoutrelative to the time of data storage. The curve shown in FIG. 16indicates the bit line voltage of the memory cell during readout,assuming the cell is programmed to programming reference voltage Vref1.

In a practical application, it is possible that the voltages appearingat the outputs of the reference voltage columns 1210, 1211, 1212 willdeviate slightly from the design values. Deviations may occur, forexample, due to asymmetries in the physical arrangement of the circuitcomponents, which are ordinarily laid out to maximize the compactness ofthe integrated circuit. Such asymmetries may result in differing linelengths and capacitance effects, for example, relative to the individualreference cells of a given pair. The deviations can be determined inadvance by computer simulation of the circuit using standard computersimulation techniques. It is then possible to compensate for thedeviations by adding appropriate signal pulling devices on the readreference lines to pull the divided outputs of the reference cells tothe design values. Such devices may also be provided for similar reasonson the memory cell bit lines of the main array.

FIG. 17 shows a read-reference signal generating circuit as justdescribed. The circuit is identical to that of FIG. 15, except for theaddition of the aforementioned signal pulling devices. These devices maybe constituted by field effect transistors 1220-1223, as shown, or byany other suitable type of device for this purpose, such as capacitorand resistor combinations, etc. The signal pulling devices arepreferably connected as closely as possible to the points where the readreference signals (and memory bit line signals) feed into themulti-level sense amplifier for reading out the memory cell. Such anarrangement will optimize the accuracy of the voltage values supplied tothe sense amplifier relative to the design values. This is, of course,desirable from the standpoint of high accuracy program margining andmemory readout.

FIG. 18 is a simplified diagram showing another embodiment of a circuit1200″ for generating the read reference signals Ref1, Ref2, and Ref3This circuit is based on the design of the circuit in FIG. 17, but thehigher-value reference cell and signal puller of each reference columnare replaced by a corresponding single pull-up device 1321, 1322, or1323 to provide the voltage divider arrangements, as shown. The pull-updevices on the individual read reference lines in FIG. 18 have theirrespective signal-pulling capacities set so that the read referencevoltages will assume the same relationships relative to the programmingreference voltages as shown in FIG. 16. It should be noted that thisembodiment is less preferred than the arrangement of FIG. 17 from thestandpoint of tracking the memory cell, since the pull-up devices 1321,1322, and 1323 on the read reference lines will not track the memorycell 1202 as closely as the reference cells with changing operatingconditions.

FIG. 19 is a more generalized diagram illustrating how the referencesignal generating circuit of FIG. 15 can be applied to a memory array.For convenience in FIG. 19, the select line 1214 and select transistors1201, which are not required but may be desirable to reduce energyconsumption, for example, have been replaced by a generic network ofcolumn pull-ups (so designated).

As shown in FIG. 19, each row of memory cells in the array is providedwith a corresponding set of reference cells 1203-1208 connected to formvoltage divider arrangements as previously described. Each set (row) ofreference cells would be selected individually for providing signals onthe reference column bit lines for readout of a memory cell of thecorresponding row of the main array. Although it is consistent with theprinciples of the present invention to use a single set of referencecells for all of the memory cells of the array (in which case thereference cells need not share the word line of any row of the array),the use of dedicated sets of reference cells for each row of the arrayis preferred for accuracy. More particularly, the use of dedicatedreference cells allows for better symmetry in the arrangement of eachset of reference cells relative to that of the corresponding row ofmemory cells within the overall memory circuit. For example, a referencecell for row M of the memory array in FIG. 20 will have the same numberand type of components connected between its bit line terminal and thereference column output as does each corresponding memory cell 1202between its bit line terminal and the column bit line output. Also, theline length from the bit line terminal of the reference cell to thereference column output can made close to or the same as the line lengthfrom the bit line terminal of each corresponding memory cell to itsassociated column bit line output. Signal pulling devices may be addedon the bit and read reference lines in a manner similar to FIG. 17. Inthis case, the signal pulling capacity of each device would bedetermined by suitable calculation during the computer simulationprocess to provide the best overall accuracy of the signal levelsprovided by the different cells within each column of the system.

FIG. 20 is a simplified diagram showing a circuit 1500 (above the dashedline) for generating programming references Vref1-Vref4 and anassociated verify reference select circuit 222 (below the dashed line)for outputting the selected signal X for program verification. As shownin FIG. 20, each row of the memory array is coupled with a set ofreference cells 1503-1506 having the same construction as the memorycells. The reference cells need not be part of the same integratedcircuit as the memory array, but they are preferably fabricatedsimultaneously with and by the same process as the array, as part of thesame integrated circuit, for the reasons previously explained. The useof a dedicated set of programming reference cells for each row of thearray is preferable for the same reasons as were discussed in connectionwith the arrangement of FIG. 20. The reference cells for producing theprogramming reference signals Vref1-Vref4 are arranged in correspondingcolumns 1511-1514, with their bit line terminals commonly connected to acorresponding bit line and a network of column pull-ups (so designated).Each set (row) of reference cells would be individually selected, via anassociated word line 1543, for providing signals on the correspondingcolumn bit lines for programming verification of a memory cell of thecorresponding row of the main memory array.

Each reference cell 1503 in column 1511 is pre-programmed at the factory(for example, as previously described in connection with FIG. 15) to thevoltage threshold V1 to produce voltage Vref1 on the column bit line.Each reference cell 1504 in column 1512 is pre-programmed to the voltagethreshold V2 to produce voltage Vref2 on the column bit line. Eachreference cell in column 1513 is pre-programmed to the voltage thresholdV3 to produce voltage Vref3 on the column bit line. Each reference cellin column 1514 is pre-programmed to the voltage threshold V4 to producevoltage Vref4 on the column bit line. Signal pulling devices may beadded on the column bit lines as previously explained if necessary tocompensate for deviations of the column bit line voltages due to effectsof layout asymmetries and the like.

The bit lines of columns 1511-1514 are coupled to corresponding selecttransistors (e.g., FETs) 271-274 of verify reference select circuit 222.The select transistors, which may be NMOS or PMOS devices, for example,can be controlled by a simple logic circuit, such as the logic circuitLC shown in FIG. 20. The circuit LC in FIG. 20 operates in accordancewith the following truth table. Note that the signals I/O0 and I/O1 areprovided as inputs from the input latch/buffer 224 (see FIG. 8).

Vref1 Vref2 Vref3 Vref4 I/O0 I/O1 Select Select Select Select 0 0 L L LH 1 0 L L H L 0 1 L H L L 1 1 H L L L

FIGS. 21A-21D are readout timing diagrams showing the bit line voltagelevel of a selected memory cell in FIG. 20 after programming to each ofthe four memory states. In each diagram, at time t0, the bit linevoltage is at its pre-charged value of Vpull-up, which is at or verynear the value of Vref4. At time t1, the voltage level has dropped tothe range indicated by the two closely spaced lines which are centeredaround the Vref level for the programmed state. The two lines indicatethat there is a slight range of tolerance for the bit line voltage levelrelative to the programming voltage reference level during read out ofthe memory cell. FIG. 21A illustrates the bit line voltage when thememory cell has been programmed to the voltage threshold V1corresponding to the programming reference level Vref1. FIG. 21Billustrates the bit line voltage when the memory cell has beenprogrammed to the voltage threshold V2 corresponding to the programmingreference level Vref2. FIG. 21C illustrates the bit line voltage whenthe memory cell has been programmed to the voltage threshold V3corresponding to the programming reference level Vref3. FIG. 21Dillustrates the bit line voltage when the memory cell has beenprogrammed to the voltage threshold V4 corresponding to the programmingreference level Vref4.

While the read reference and programming reference generating circuitshave been shown and described as separate circuits above, the circuitsmay readily be combined to share components as shown in FIG. 22. This ispossible because the programming reference signals and the readreference signals need not be used at the same time. More particularly,the programming reference signals need only be used during the memorycell programming operation, whereas the read reference signals need onlybe used during the memory cell readout operation.

The circuit shown in FIG. 22 is a modification of the circuit of FIG.19. In the circuit of FIG. 22, the bit line of reference cells 1203 isconnected to provide programming reference voltage Vref1, the bit lineof reference cells 1204 is connected to provide programming referencevoltage Vref2, the bit line of reference cells 1207 is connected toprovide programming reference voltage Vref3, and the bit line ofreference cells 1208 is connected to provide programming referencevoltage Vref4. Select transistors 271-274 correspond to the selecttransistors shown in FIG. 20.

FIG. 23 shows a modification of the circuit in FIG. 22, in which theEANVM reference cells 1203-1208 are replaced by ROM cells 2203-2208,respectively. The use of ROM cells as reference cells is advantageousbecause it avoids the initial programming requirement of EANVM referencecells, although the tracking effect of the reference signals relative tothe EANVM cells of the main array may be reduced somewhat. To maximizethe tracking effect, corresponding portions of the ROM cells and theEANVM cells can be fabricated by the same process steps. For example,the sources, drains, channel regions, and control gates of the EANVMcells and the ROM cells may be fabricated in this manner, with separateprocess steps being used to provide the EANVM floating gates and the ROMthreshold implants.

As previously stated, the illustrative embodiments described herein aremerely exemplary, and numerous changes and modifications can be madeconsistent with the principles of the invention. For example, althoughthe invention has been explained in terms of voltage-based memorysystems which utilize voltage signals from the memory and referencecells, the principles of the invention are equally applicable tocurrent-based memory systems in which current levels rather than voltagelevels are utilized.

1. A non-volatile semiconductor memory device, comprising: a pluralityof non-volatile memory cells each of which has a storage structure andan electrically alterable parameter representing data of at least twobits, wherein the electrically alterable parameters of the plurality ofnon-volatile memory cells are shiftable to at least three mutuallydifferent first, second and third program states from an erase state;reference value generating circuitry generating first, second and thirdprogramming reference values for programming the first, second and thirdprogram states, and generating first, second and third read referencevalues, which are different from the first, second and third programmingreference values, for reading the first, second and third programstates; and sensing/program-verifying circuitry receiving the parameterof one non-volatile memory cell, the first, second and third readreference values and the first, second and third read programmingreference values; wherein the first read reference value is allocatedbetween the first program state and the second program state, the secondread reference value is allocated between the second program state andthe third program state, and the third read reference value is allocatedbetween the third program state and the erase state, wherein the secondread reference value is allocated substantially at a midpoint betweenthe second program state and the third program state, and the third readreference value is shifted toward the second program state from amidpoint between the third program state and the erase state, whereinthe sensing/program-verifying circuitry generates data of at least twobits represented by the electrically alterable parameter, verifieswhether the electrically alterable parameter is shifted to the parameterindicating a selected one state of the first, second and third programstates, and programs the electrically alterable parameter until it hasbeen verified that the electrically alterable parameter has been shiftedto the selected one state, wherein the first, second and thirdprogramming reference values are used for verifying whether theelectrically alterable parameter is shifted to the first, second orthird program state, and the first, second and third read referencevalues are used for detecting whether the electrically alterableparameter is near to the first, second or third program state, andwherein the reference value generating circuitry generates the first,second and third programming reference values and the first, second andthird read reference values such that one of the first, second and thirdprogramming reference values and the first, second and third readreference values is shifted from and dependent upon the other.
 2. Anon-volatile semiconductor memory device according to claim 1, wherein ashift amount of one of the first, second and third read reference valuesfrom the corresponding one of the first, second and third programmingreference values is dependent upon the corresponding one of the first,second and third programming reference values.
 3. A non-volatilesemiconductor memory device according to claim 1, wherein the referencevalue generating circuitry includes: a first reference value generatingcircuit which generates the first programming reference value and thefirst read reference value, a second reference value generating circuitwhich generates the second programming reference value and the secondread reference value, and a third reference value generating circuitwhich generates the third programming reference value and the third readreference value, and wherein each of the first reference valuegenerating circuit, the second reference value generating circuit andthe third reference value generating circuit includes an element causingthe corresponding read reference value and the corresponding programmingreference value to have different values.
 4. A non-volatilesemiconductor memory device according to claim 3, wherein each of thefirst reference value generating circuit, the second reference valuegenerating circuit and the third reference value generating circuitfurther includes a reference cell which has substantially the sameconstruction as each of said plurality of memory cells, and thereference cell and the element of each reference value generatingcircuit cooperate to provide a predetermined difference between thecorresponding read and programming reference values.
 5. A non-volatilesemiconductor memory device according to claim 1, wherein each readreference value is dependent upon the corresponding programmingreference value.
 6. A non-volatile semiconductor memory device accordingto claim 1, wherein a conductivity value of the one non-volatile memorycell is decreased in order of the state indicating the erase state, thefirst program state, the second program state and the third programstate, and wherein the programming states of non-volatile memory cellsof one of a byte, a block and a chip level can be shifted to the erasestate by an erase operation.
 7. A non-volatile semiconductor memorydevice according to claim 6, wherein each of the plurality ofnon-volatile memory cells has a floating gate to which electrons arecapable of being injected from a channel by hot electron injection.
 8. Anon-volatile semiconductor memory device according to claim 6, whereineach of the plurality of non-volatile memory cells has a floating gateto which electrons are capable of being injected from a channel byFowler-Nordheim tunneling.
 9. A non-volatile semiconductor memory deviceaccording to claim 2, wherein a conductivity value of the onenon-volatile memory cell is decreased in order of the state indicatingthe erase state, the first program state, the second program state andthe third program state, and wherein the programming states ofnon-volatile memory cells of one of a byte, a block and a chip level canbe shifted to the erase state by an erase operation.
 10. A non-volatilesemiconductor memory device according to claim 9, wherein each of theplurality of non-volatile memory cells has a floating gate to whichelectrons are capable of being injected from a channel by hot electroninjection.
 11. A non-volatile semiconductor memory device according toclaim 9, wherein each of the plurality of non-volatile memory cells hasa floating gate to which electrons are capable of being injected from achannel by Fowler-Nordheim tunneling.
 12. A non-volatile semiconductormemory device according to claim 3, wherein a conductivity value of theone non-volatile memory cell is decreased in order of the stateindicating the erase state, the first program state, the second programstate and the third program state, and wherein conductivity values ofnon-volatile memory cells of one of a byte, a block and a chip level canbe shifted to the erase state by an erase operation.
 13. A non-volatilesemiconductor memory device according to claim 12, wherein each of theplurality of non-volatile memory cells has a floating gate to whichelectrons are capable of being injected from a channel by hot electroninjection.
 14. A non-volatile semiconductor memory device according toclaim 12, wherein each of the plurality of non-volatile memory cells hasa floating gate to which electrons are capable of being injected from achannel by Fowler-Nordheim tunneling.
 15. A non-volatile semiconductormemory device according to claim 4, wherein a conductivity value of theone non-volatile memory cell is decreased in order of the stateindicating the erase state, the first program state, the second programstate and the third program state, and wherein conductivity values ofnon-volatile memory cells of one of a byte, a block and a chip level canbe shifted to the erase state by an erase operation.
 16. A non-volatilesemiconductor memory device according to claim 15, wherein each of theplurality of-non-volatile memory cells has a floating gate to whichelectrons are capable of being injected from a channel by hot electroninjection.
 17. A non-volatile semiconductor memory device according toclaim 15, wherein each of the plurality of non-volatile memory cells hasa floating gate to which electrons are capable of being injected from achannel by Fowler-Nordheim tunneling.
 18. A non-volatile semiconductormemory device according to claim 5, wherein a conductivity value of theone non-volatile memory cell is decreased in order of the stateindicating the erase state, the first program state, the second programstate and the third program state, and wherein conductivity values ofnon-volatile memory cells of one of a byte, a block and a chip level canbe shifted to the erase state by an erase operation.
 19. A non-volatilesemiconductor memory device according to claim 18, wherein each of theplurality of non-volatile memory cells has a floating gate to whichelectrons are capable of being injected from a channel by hot electroninjection.
 20. A non-volatile semiconductor memory device according toclaim 18, wherein each of the plurality of non-volatile memory cells hasa floating gate to which electrons are capable of being injected from achannel by Fowler-Nordheim tunneling.
 21. A non-volatile semiconductormemory device according to claim 1, wherein the first, second and thirdread reference values are dependent upon the first, second and thirdprogramming reference values, respectively.